The-OpenROAD-Project_OpenROAD/src/rcx/example/sky130/patterns.rules

Extraction Rules for OpenRCX

DIAGMODEL ON

LayerCount 6
DensityRate 1  0

DensityModel 0

Metal 1 OVER
WIDTH Table 1 entries:  0.17

Metal 1 OVER 0
DIST count 12 width 0.17
0.17 7.80814e-05 1.75053e-05 0.0340853
0.34 4.39821e-05 2.06824e-05 0.0340853
0.425 3.65511e-05 2.18141e-05 0.0340853
0.51 3.21116e-05 2.2171e-05 0.0340853
0.595 3.00458e-05 2.12989e-05 0.0340853
0.68 2.77259e-05 2.15261e-05 0.0340853
0.765 2.52695e-05 2.19586e-05 0.0340853
0.85 1.189e-05 3.40862e-05 0.0340853
1.02 0 4.45247e-05 0.0340853
1.36 0 4.15832e-05 0.0340853
1.7 0 3.91595e-05 0.0340853
1.87 0 3.91595e-05 0.0340853
END DIST

Metal 1 UNDER
WIDTH Table 1 entries:  0.17

Metal 1 UNDER 2
DIST count 12 width 0.17
0.17 6.40137e-05 3.74522e-05 0.0340853
0.34 3.43738e-05 3.49623e-05 0.0340853
0.425 2.92622e-05 3.53164e-05 0.0340853
0.51 2.48215e-05 3.69326e-05 0.0340853
0.595 0 5.98238e-05 0.0340853
0.68 0 5.85137e-05 0.0340853
0.765 0 5.71708e-05 0.0340853
0.85 0 5.6541e-05 0.0340853
1.02 0 5.61744e-05 0.0340853
1.36 0 6.02154e-05 0.0340853
1.7 0 5.95496e-05 0.0340853
1.87 0 5.74997e-05 0.0340853
END DIST

Metal 1 UNDER 3
DIST count 12 width 0.17
0.17 7.53687e-05 2.0771e-05 0.0340853
0.34 4.1955e-05 2.3469e-05 0.0340853
0.425 3.45303e-05 2.49959e-05 0.0340853
0.51 2.99813e-05 2.56494e-05 0.0340853
0.595 2.7342e-05 2.54711e-05 0.0340853
0.68 2.45898e-05 2.61914e-05 0.0340853
0.765 0 4.885e-05 0.0340853
0.85 0 4.77573e-05 0.0340853
1.02 0 4.68512e-05 0.0340853
1.36 0 4.55241e-05 0.0340853
1.7 0 4.32421e-05 0.0340853
1.87 0 4.32421e-05 0.0340853
END DIST

Metal 1 UNDER 4
DIST count 12 width 0.17
0.17 7.55374e-05 2.01721e-05 0.0340853
0.34 4.30713e-05 2.17071e-05 0.0340853
0.425 3.56713e-05 2.32023e-05 0.0340853
0.51 3.11553e-05 2.3858e-05 0.0340853
0.595 2.85355e-05 2.36337e-05 0.0340853
0.68 2.58068e-05 2.42206e-05 0.0340853
0.765 0 4.79127e-05 0.0340853
0.85 0 4.65781e-05 0.0340853
1.02 0 4.50654e-05 0.0340853
1.36 0 4.24239e-05 0.0340853
1.7 0 4.12285e-05 0.0340853
1.87 0 4.12285e-05 0.0340853
END DIST

Metal 1 UNDER 5
DIST count 12 width 0.17
0.17 7.66759e-05 1.89351e-05 0.0340853
0.34 4.37798e-05 2.09865e-05 0.0340853
0.425 3.6628e-05 2.21463e-05 0.0340853
0.51 3.22975e-05 2.24532e-05 0.0340853
0.595 2.98668e-05 2.19317e-05 0.0340853
0.68 2.72456e-05 2.23731e-05 0.0340853
0.765 2.44815e-05 2.30345e-05 0.0340853
0.85 0 4.62225e-05 0.0340853
1.02 0 4.48321e-05 0.0340853
1.36 0 4.24985e-05 0.0340853
1.7 0 4.02629e-05 0.0340853
1.87 0 4.02629e-05 0.0340853
END DIST

Metal 1 UNDER 6
DIST count 12 width 0.17
0.17 7.64765e-05 1.91003e-05 0.0340853
0.34 4.39351e-05 2.06592e-05 0.0340853
0.425 3.68013e-05 2.178e-05 0.0340853
0.51 3.25038e-05 2.20599e-05 0.0340853
0.595 3.0094e-05 2.14825e-05 0.0340853
0.68 2.74879e-05 2.18528e-05 0.0340853
0.765 2.47421e-05 2.24453e-05 0.0340853
0.85 0 4.58681e-05 0.0340853
1.02 0 4.45285e-05 0.0340853
1.36 0 4.26444e-05 0.0340853
1.7 0 3.97935e-05 0.0340853
1.87 0 4.03529e-05 0.0340853
END DIST

Metal 1 DIAGUNDER
WIDTH Table 1 entries:  0.17

Metal 1 DIAGUNDER 2
DIST count 12 width 0.17
0 0 2.66887e-05 0.0340853
0.17 0 2.24007e-05 0.0340853
0.34 0 1.9211e-05 0.0340853
0.425 0 1.79128e-05 0.0340853
0.51 0 1.68696e-05 0.0340853
0.595 0 1.60676e-05 0.0340853
0.68 0 1.54732e-05 0.0340853
0.765 0 1.50473e-05 0.0340853
0.85 0 1.47528e-05 0.0340853
1.02 0 1.44392e-05 0.0340853
1.36 0 1.43783e-05 0.0340853
1.7 0 0 0.0340853
END DIST

Metal 1 DIAGUNDER 3
DIST count 12 width 0.17
0 0 1.30121e-05 0.0340853
0.17 0 1.24717e-05 0.0340853
0.34 0 1.19979e-05 0.0340853
0.425 0 0 0.0340853
0.51 0 0 0.0340853
0.595 0 0 0.0340853
0.68 0 0 0.0340853
0.765 0 0 0.0340853
0.85 0 0 0.0340853
1.02 0 0 0.0340853
1.36 0 0 0.0340853
1.7 0 0 0.0340853
END DIST

Metal 1 DIAGUNDER 4
DIST count 12 width 0.17
0 0 0 0.0340853
0.17 0 0 0.0340853
0.34 0 0 0.0340853
0.425 0 0 0.0340853
0.51 0 0 0.0340853
0.595 0 0 0.0340853
0.68 0 0 0.0340853
0.765 0 0 0.0340853
0.85 0 0 0.0340853
1.02 0 0 0.0340853
1.36 0 0 0.0340853
1.7 0 0 0.0340853
END DIST

Metal 1 DIAGUNDER 5
DIST count 12 width 0.17
0 0 0 0.0340853
0.17 0 0 0.0340853
0.34 0 0 0.0340853
0.425 0 0 0.0340853
0.51 0 0 0.0340853
0.595 0 0 0.0340853
0.68 0 0 0.0340853
0.765 0 0 0.0340853
0.85 0 0 0.0340853
1.02 0 0 0.0340853
1.36 0 0 0.0340853
1.7 0 0 0.0340853
END DIST

Metal 1 DIAGUNDER 6
DIST count 0 width 0.17
END DIST

Metal 2 OVER
WIDTH Table 1 entries:  0.14

Metal 2 OVER 0
DIST count 12 width 0.14
0.14 0.000126705 1.69429e-05 0.000602828
0.28 7.46988e-05 1.81279e-05 0.000602828
0.35 6.28826e-05 1.82789e-05 0.000602828
0.42 5.59808e-05 1.77535e-05 0.000602828
0.49 5.19597e-05 1.52693e-05 0.000602828
0.56 4.59253e-05 1.65806e-05 0.000602828
0.63 4.11551e-05 1.81784e-05 0.000602828
0.7 3.76403e-05 1.91814e-05 0.000602828
0.84 3.18492e-05 2.11765e-05 0.000602828
1.12 0 4.80293e-05 0.000602828
1.4 0 4.48475e-05 0.000602828
1.54 0 3.93273e-05 0.000602828
END DIST

Metal 2 OVER 1
DIST count 12 width 0.14
0.14 0.000124925 2.12653e-05 0.000602828
0.28 6.83342e-05 2.73975e-05 0.000602828
0.35 5.74e-05 2.81168e-05 0.000602828
0.42 5.05136e-05 2.84142e-05 0.000602828
0.49 4.58366e-05 2.77946e-05 0.000602828
0.56 3.96776e-05 2.98774e-05 0.000602828
0.63 3.48596e-05 3.20561e-05 0.000602828
0.7 3.13122e-05 3.36066e-05 0.000602828
0.84 0 6.21654e-05 0.000602828
1.12 0 5.92426e-05 0.000602828
1.4 0 5.79046e-05 0.000602828
1.54 0 5.53584e-05 0.000602828
END DIST

Metal 2 UNDER
WIDTH Table 1 entries:  0.14

Metal 2 UNDER 3
DIST count 12 width 0.14
0.14 0.000119913 2.69032e-05 0.000602828
0.28 6.4542e-05 3.31462e-05 0.000602828
0.35 5.1747e-05 3.71475e-05 0.000602828
0.42 4.31872e-05 4.05379e-05 0.000602828
0.49 3.82702e-05 4.13373e-05 0.000602828
0.56 3.20003e-05 4.46447e-05 0.000602828
0.63 0 7.46288e-05 0.000602828
0.7 0 7.30473e-05 0.000602828
0.84 0 7.07583e-05 0.000602828
1.12 0 6.81822e-05 0.000602828
1.4 0 6.73803e-05 0.000602828
1.54 0 6.24466e-05 0.000602828
END DIST

Metal 2 UNDER 4
DIST count 12 width 0.14
0.14 0.000124851 2.08168e-05 0.000602828
0.28 7.27165e-05 2.16339e-05 0.000602828
0.35 6.0916e-05 2.24422e-05 0.000602828
0.42 5.38771e-05 2.23446e-05 0.000602828
0.49 4.93492e-05 2.10383e-05 0.000602828
0.56 4.30377e-05 2.28374e-05 0.000602828
0.63 3.79965e-05 2.4683e-05 0.000602828
0.7 3.4276e-05 2.58565e-05 0.000602828
0.84 0 5.6372e-05 0.000602828
1.12 0 5.18813e-05 0.000602828
1.4 0 4.94207e-05 0.000602828
1.54 0 4.59055e-05 0.000602828
END DIST

Metal 2 UNDER 5
DIST count 12 width 0.14
0.14 0.000124854 1.97367e-05 0.000602828
0.28 7.45768e-05 1.88088e-05 0.000602828
0.35 6.25397e-05 1.96391e-05 0.000602828
0.42 5.53507e-05 1.92854e-05 0.000602828
0.49 5.08886e-05 1.75967e-05 0.000602828
0.56 4.46968e-05 1.90447e-05 0.000602828
0.63 3.98938e-05 2.06166e-05 0.000602828
0.7 3.645e-05 2.15399e-05 0.000602828
0.84 3.09278e-05 2.33733e-05 0.000602828
1.12 0 4.96058e-05 0.000602828
1.4 0 4.65481e-05 0.000602828
1.54 0 4.20146e-05 0.000602828
END DIST

Metal 2 UNDER 6
DIST count 12 width 0.14
0.14 0.000122053 2.16391e-05 0.000602828
0.28 7.24885e-05 1.97116e-05 0.000602828
0.35 6.14079e-05 1.96803e-05 0.000602828
0.42 5.50082e-05 1.88889e-05 0.000602828
0.49 5.11353e-05 1.6872e-05 0.000602828
0.56 4.52255e-05 1.81151e-05 0.000602828
0.63 4.05598e-05 1.95483e-05 0.000602828
0.7 3.71772e-05 2.03236e-05 0.000602828
0.84 3.17075e-05 2.18549e-05 0.000602828
1.12 0 4.86567e-05 0.000602828
1.4 0 4.58269e-05 0.000602828
1.54 0 4.12848e-05 0.000602828
END DIST

Metal 2 DIAGUNDER
WIDTH Table 1 entries:  0.14

Metal 2 DIAGUNDER 3
DIST count 12 width 0.14
0 0 2.71036e-05 0.000602828
0.14 0 2.26244e-05 0.000602828
0.28 0 1.9302e-05 0.000602828
0.35 0 1.77945e-05 0.000602828
0.42 0 1.64862e-05 0.000602828
0.49 0 1.53943e-05 0.000602828
0.56 0 0 0.000602828
0.63 0 0 0.000602828
0.7 0 0 0.000602828
0.84 0 0 0.000602828
1.12 0 0 0.000602828
1.4 0 0 0.000602828
END DIST

Metal 2 DIAGUNDER 4
DIST count 12 width 0.14
0 0 0 0.000602828
0.14 0 0 0.000602828
0.28 0 0 0.000602828
0.35 0 0 0.000602828
0.42 0 0 0.000602828
0.49 0 0 0.000602828
0.56 0 0 0.000602828
0.63 0 0 0.000602828
0.7 0 0 0.000602828
0.84 0 0 0.000602828
1.12 0 0 0.000602828
1.4 0 0 0.000602828
END DIST

Metal 2 DIAGUNDER 5
DIST count 12 width 0.14
0 0 0 0.000602828
0.14 0 0 0.000602828
0.28 0 0 0.000602828
0.35 0 0 0.000602828
0.42 0 0 0.000602828
0.49 0 0 0.000602828
0.56 0 0 0.000602828
0.63 0 0 0.000602828
0.7 0 0 0.000602828
0.84 0 0 0.000602828
1.12 0 0 0.000602828
1.4 0 0 0.000602828
END DIST

Metal 2 DIAGUNDER 6
DIST count 12 width 0.14
0 0 0 0.000602828
0.14 0 0 0.000602828
0.28 0 0 0.000602828
0.35 0 0 0.000602828
0.42 0 0 0.000602828
0.49 0 0 0.000602828
0.56 0 0 0.000602828
0.63 0 0 0.000602828
0.7 0 0 0.000602828
0.84 0 0 0.000602828
1.12 0 0 0.000602828
1.4 0 0 0.000602828
END DIST

Metal 2 OVERUNDER
WIDTH Table 1 entries:  0.14

Metal 2 OVER 1 UNDER 3
DIST count 12 width 0.14
0.14 0.000115711 3.95317e-05 0.000602828
0.28 5.99226e-05 4.73528e-05 0.000602828
0.35 4.55892e-05 5.44448e-05 0.000602828
0.42 3.68959e-05 5.92302e-05 0.000602828
0.49 3.19173e-05 6.41169e-05 0.000602828
0.56 0 9.40141e-05 0.000602828
0.63 0 9.28355e-05 0.000602828
0.7 0 9.20094e-05 0.000602828
0.84 0 9.09704e-05 0.000602828
1.12 0 9.00732e-05 0.000602828
1.4 0 8.95317e-05 0.000602828
1.54 0 7.97485e-05 0.000602828
END DIST

Metal 2 OVER 1 UNDER 4
DIST count 12 width 0.14
0.14 0.000122054 2.60343e-05 0.000602828
0.28 6.57286e-05 3.21217e-05 0.000602828
0.35 5.48835e-05 3.32019e-05 0.000602828
0.42 4.79763e-05 3.38951e-05 0.000602828
0.49 4.29871e-05 3.41929e-05 0.000602828
0.56 3.6639e-05 3.68377e-05 0.000602828
0.63 3.15815e-05 3.94026e-05 0.000602828
0.7 0 6.90848e-05 0.000602828
0.84 0 6.65025e-05 0.000602828
1.12 0 6.40321e-05 0.000602828
1.4 0 6.32204e-05 0.000602828
1.54 0 6.09196e-05 0.000602828
END DIST

Metal 2 OVER 1 UNDER 5
DIST count 12 width 0.14
0.14 0.000122426 2.40918e-05 0.000602828
0.28 6.7589e-05 2.86115e-05 0.000602828
0.35 5.63412e-05 2.994e-05 0.000602828
0.42 4.90907e-05 3.05888e-05 0.000602828
0.49 4.40045e-05 3.06404e-05 0.000602828
0.56 3.77283e-05 3.29391e-05 0.000602828
0.63 3.29069e-05 3.51773e-05 0.000602828
0.7 2.94346e-05 3.6728e-05 0.000602828
0.84 0 6.35952e-05 0.000602828
1.12 0 6.09783e-05 0.000602828
1.4 0 5.97395e-05 0.000602828
1.54 0 5.68452e-05 0.000602828
END DIST

Metal 2 OVER 1 UNDER 6
DIST count 12 width 0.14
0.14 0.000121231 2.50322e-05 0.000602828
0.28 6.6855e-05 2.86238e-05 0.000602828
0.35 5.59746e-05 2.96289e-05 0.000602828
0.42 4.90724e-05 3.01043e-05 0.000602828
0.49 4.42788e-05 2.99591e-05 0.000602828
0.56 3.81427e-05 3.20581e-05 0.000602828
0.63 3.3433e-05 3.40918e-05 0.000602828
0.7 3.0039e-05 3.5427e-05 0.000602828
0.84 0 6.26157e-05 0.000602828
1.12 0 5.97235e-05 0.000602828
1.4 0 5.85572e-05 0.000602828
1.54 0 5.6737e-05 0.000602828
END DIST

Metal 3 OVER
WIDTH Table 1 entries:  0.14

Metal 3 OVER 0
DIST count 12 width 0.14
0.14 0.000125337 1.79688e-05 0.000610664
0.28 7.26454e-05 1.98457e-05 0.000610664
0.35 6.08372e-05 2.04521e-05 0.000610664
0.42 5.5435e-05 1.87551e-05 0.000610664
0.49 5.26049e-05 1.52549e-05 0.000610664
0.56 4.70156e-05 1.65661e-05 0.000610664
0.63 4.32147e-05 1.7029e-05 0.000610664
0.7 4.01097e-05 1.74903e-05 0.000610664
0.84 3.52494e-05 1.84518e-05 0.000610664
1.12 1.45156e-05 3.42103e-05 0.000610664
1.4 0 4.53737e-05 0.000610664
1.54 0 3.72897e-05 0.000610664
END DIST

Metal 3 OVER 1
DIST count 12 width 0.14
0.14 0.000121359 2.27847e-05 0.000610664
0.28 7.12062e-05 2.17021e-05 0.000610664
0.35 5.9699e-05 2.23371e-05 0.000610664
0.42 5.37889e-05 2.14398e-05 0.000610664
0.49 5.02976e-05 1.94672e-05 0.000610664
0.56 4.46325e-05 2.11813e-05 0.000610664
0.63 4.06686e-05 2.19771e-05 0.000610664
0.7 3.73942e-05 2.26623e-05 0.000610664
0.84 3.22878e-05 2.38233e-05 0.000610664
1.12 0 5.11638e-05 0.000610664
1.4 0 4.82781e-05 0.000610664
1.54 0 4.24488e-05 0.000610664
END DIST

Metal 3 OVER 2
DIST count 12 width 0.14
0.14 0.000118629 2.91434e-05 0.000610664
0.28 6.42315e-05 3.38461e-05 0.000610664
0.35 5.02322e-05 3.87027e-05 0.000610664
0.42 4.40056e-05 3.91623e-05 0.000610664
0.49 3.9875e-05 3.84607e-05 0.000610664
0.56 3.39899e-05 4.09095e-05 0.000610664
0.63 2.97926e-05 4.24571e-05 0.000610664
0.7 0 7.02276e-05 0.000610664
0.84 0 6.7544e-05 0.000610664
1.12 0 6.50523e-05 0.000610664
1.4 0 6.38384e-05 0.000610664
1.54 0 6.06905e-05 0.000610664
END DIST

Metal 3 UNDER
WIDTH Table 1 entries:  0.14

Metal 3 UNDER 4
DIST count 12 width 0.14
0.14 0.000120339 2.52337e-05 0.000610664
0.28 6.70851e-05 2.81302e-05 0.000610664
0.35 5.51363e-05 2.99546e-05 0.000610664
0.42 4.7783e-05 3.12797e-05 0.000610664
0.49 4.12407e-05 3.29657e-05 0.000610664
0.56 3.54369e-05 3.53558e-05 0.000610664
0.63 3.12852e-05 3.68416e-05 0.000610664
0.7 0 6.60191e-05 0.000610664
0.84 0 6.29747e-05 0.000610664
1.12 0 5.94592e-05 0.000610664
1.4 0 5.74232e-05 0.000610664
1.54 0 5.41425e-05 0.000610664
END DIST

Metal 3 UNDER 5
DIST count 12 width 0.14
0.14 0.00012304 2.09802e-05 0.000610664
0.28 7.1856e-05 2.06267e-05 0.000610664
0.35 6.0379e-05 2.12968e-05 0.000610664
0.42 5.45496e-05 2.0332e-05 0.000610664
0.49 5.11512e-05 1.82102e-05 0.000610664
0.56 4.54989e-05 1.98361e-05 0.000610664
0.63 4.15449e-05 2.05385e-05 0.000610664
0.7 3.82569e-05 2.11538e-05 0.000610664
0.84 3.30366e-05 2.2265e-05 0.000610664
1.12 0 5.00198e-05 0.000610664
1.4 0 4.68218e-05 0.000610664
1.54 0 4.1369e-05 0.000610664
END DIST

Metal 3 UNDER 6
DIST count 12 width 0.14
0.14 0.00012449 1.9371e-05 0.000610664
0.28 7.29361e-05 1.93863e-05 0.000610664
0.35 6.14849e-05 2.00391e-05 0.000610664
0.42 5.56289e-05 1.88651e-05 0.000610664
0.49 5.21962e-05 1.64493e-05 0.000610664
0.56 4.64248e-05 1.79575e-05 0.000610664
0.63 4.2412e-05 1.8572e-05 0.000610664
0.7 3.91055e-05 1.91408e-05 0.000610664
0.84 3.39446e-05 2.02283e-05 0.000610664
1.12 0 4.91663e-05 0.000610664
1.4 0 4.60815e-05 0.000610664
1.54 0 4.04726e-05 0.000610664
END DIST

Metal 3 DIAGUNDER
WIDTH Table 1 entries:  0.14

Metal 3 DIAGUNDER 4
DIST count 12 width 0.14
0 0 2.89764e-05 0.000610664
0.14 0 2.70012e-05 0.000610664
0.28 0 2.51016e-05 0.000610664
0.35 0 2.40922e-05 0.000610664
0.42 0 2.30957e-05 0.000610664
0.49 0 2.21433e-05 0.000610664
0.56 0 2.12575e-05 0.000610664
0.63 0 2.04523e-05 0.000610664
0.7 0 1.97342e-05 0.000610664
0.84 0 1.85571e-05 0.000610664
1.12 0 1.70525e-05 0.000610664
1.4 0 1.62383e-05 0.000610664
END DIST

Metal 3 DIAGUNDER 5
DIST count 12 width 0.14
0 0 0 0.000610664
0.14 0 0 0.000610664
0.28 0 0 0.000610664
0.35 0 0 0.000610664
0.42 0 0 0.000610664
0.49 0 0 0.000610664
0.56 0 0 0.000610664
0.63 0 0 0.000610664
0.7 0 0 0.000610664
0.84 0 0 0.000610664
1.12 0 0 0.000610664
1.4 0 0 0.000610664
END DIST

Metal 3 DIAGUNDER 6
DIST count 12 width 0.14
0 0 0 0.000610664
0.14 0 0 0.000610664
0.28 0 0 0.000610664
0.35 0 0 0.000610664
0.42 0 0 0.000610664
0.49 0 0 0.000610664
0.56 0 0 0.000610664
0.63 0 0 0.000610664
0.7 0 0 0.000610664
0.84 0 0 0.000610664
1.12 0 0 0.000610664
1.4 0 0 0.000610664
END DIST

Metal 3 OVERUNDER
WIDTH Table 1 entries:  0.14

Metal 3 OVER 1 UNDER 4
DIST count 12 width 0.14
0.14 0.000118529 2.83529e-05 0.000610664
0.28 6.57925e-05 3.0598e-05 0.000610664
0.35 5.38536e-05 3.25644e-05 0.000610664
0.42 4.61614e-05 3.43474e-05 0.000610664
0.49 3.92433e-05 3.68604e-05 0.000610664
0.56 3.34295e-05 3.94661e-05 0.000610664
0.63 1.4869e-05 5.55061e-05 0.000610664
0.7 0 6.83626e-05 0.000610664
0.84 0 6.54271e-05 0.000610664
1.12 0 6.21209e-05 0.000610664
1.4 0 6.03709e-05 0.000610664
1.54 0 5.83889e-05 0.000610664
END DIST

Metal 3 OVER 1 UNDER 5
DIST count 12 width 0.14
0.14 0.000120662 2.44102e-05 0.000610664
0.28 7.09369e-05 2.24921e-05 0.000610664
0.35 5.92305e-05 2.36401e-05 0.000610664
0.42 5.27481e-05 2.34325e-05 0.000610664
0.49 4.86924e-05 2.23574e-05 0.000610664
0.56 4.28728e-05 2.42975e-05 0.000610664
0.63 3.8783e-05 2.52494e-05 0.000610664
0.7 3.5426e-05 2.60288e-05 0.000610664
0.84 3.0246e-05 2.72876e-05 0.000610664
1.12 0 5.27821e-05 0.000610664
1.4 0 5.02684e-05 0.000610664
1.54 0 4.58395e-05 0.000610664
END DIST

Metal 3 OVER 1 UNDER 6
DIST count 12 width 0.14
0.14 0.000121517 2.2947e-05 0.000610664
0.28 7.15256e-05 2.12804e-05 0.000610664
0.35 6.0067e-05 2.21048e-05 0.000610664
0.42 5.37628e-05 2.16299e-05 0.000610664
0.49 4.98066e-05 2.03645e-05 0.000610664
0.56 4.39457e-05 2.22595e-05 0.000610664
0.63 3.97964e-05 2.31903e-05 0.000610664
0.7 3.63694e-05 2.39679e-05 0.000610664
0.84 3.1075e-05 2.52323e-05 0.000610664
1.12 0 5.14448e-05 0.000610664
1.4 0 4.88499e-05 0.000610664
1.54 0 4.50725e-05 0.000610664
END DIST

Metal 3 OVER 2 UNDER 4
DIST count 12 width 0.14
0.14 0.000113088 3.72796e-05 0.000610664
0.28 5.54203e-05 4.81501e-05 0.000610664
0.35 4.21129e-05 5.35743e-05 0.000610664
0.42 3.49619e-05 5.61277e-05 0.000610664
0.49 3.00794e-05 5.97612e-05 0.000610664
0.56 0 8.74167e-05 0.000610664
0.63 0 8.55999e-05 0.000610664
0.7 0 8.42561e-05 0.000610664
0.84 0 8.25801e-05 0.000610664
1.12 0 8.13398e-05 0.000610664
1.4 0 8.08449e-05 0.000610664
1.54 0 7.36241e-05 0.000610664
END DIST

Metal 3 OVER 2 UNDER 5
DIST count 12 width 0.14
0.14 0.000116942 3.22289e-05 0.000610664
0.28 6.27955e-05 3.66172e-05 0.000610664
0.35 4.85748e-05 4.20538e-05 0.000610664
0.42 4.18228e-05 4.33759e-05 0.000610664
0.49 3.7157e-05 4.379e-05 0.000610664
0.56 3.12022e-05 4.65498e-05 0.000610664
0.63 0 7.52222e-05 0.000610664
0.7 0 7.32374e-05 0.000610664
0.84 0 7.05184e-05 0.000610664
1.12 0 6.80036e-05 0.000610664
1.4 0 6.70202e-05 0.000610664
1.54 0 6.39715e-05 0.000610664
END DIST

Metal 3 OVER 2 UNDER 6
DIST count 12 width 0.14
0.14 0.000117896 3.01497e-05 0.000610664
0.28 6.40233e-05 3.39705e-05 0.000610664
0.35 5.00519e-05 3.90119e-05 0.000610664
0.42 4.3502e-05 3.98957e-05 0.000610664
0.49 3.89822e-05 3.98979e-05 0.000610664
0.56 3.29899e-05 4.24939e-05 0.000610664
0.63 1.45575e-05 5.82514e-05 0.000610664
0.7 0 7.07273e-05 0.000610664
0.84 0 6.79138e-05 0.000610664
1.12 0 6.5355e-05 0.000610664
1.4 0 6.42926e-05 0.000610664
1.54 0 6.27489e-05 0.000610664
END DIST

Metal 4 OVER
WIDTH Table 1 entries:  0.3

Metal 4 OVER 0
DIST count 12 width 0.3
0.3 0.000136876 1.70463e-05 8.31416e-05
0.6 7.69138e-05 1.82357e-05 8.31416e-05
0.75 6.37532e-05 1.92254e-05 8.31416e-05
0.9 5.53591e-05 1.97239e-05 8.31416e-05
1.05 5.1182e-05 1.69987e-05 8.31416e-05
1.2 4.49741e-05 1.81771e-05 8.31416e-05
1.35 4.09635e-05 1.88066e-05 8.31416e-05
1.5 3.71362e-05 2.00131e-05 8.31416e-05
1.8 3.21699e-05 2.11692e-05 8.31416e-05
2.4 2.52503e-05 2.32072e-05 8.31416e-05
3 1.95584e-05 2.5698e-05 8.31416e-05
3.3 0 3.96504e-05 8.31416e-05
END DIST

Metal 4 OVER 1
DIST count 12 width 0.3
0.3 0.000135543 1.93502e-05 8.31416e-05
0.6 7.65766e-05 1.93759e-05 8.31416e-05
0.75 6.34882e-05 2.0449e-05 8.31416e-05
0.9 5.5453e-05 2.04593e-05 8.31416e-05
1.05 5.07988e-05 1.87271e-05 8.31416e-05
1.2 4.43771e-05 2.03091e-05 8.31416e-05
1.35 4.01529e-05 2.12855e-05 8.31416e-05
1.5 3.61823e-05 2.27689e-05 8.31416e-05
1.8 3.10077e-05 2.44032e-05 8.31416e-05
2.4 2.40812e-05 2.70227e-05 8.31416e-05
3 1.87023e-05 2.97244e-05 8.31416e-05
3.3 0 4.3667e-05 8.31416e-05
END DIST

Metal 4 OVER 2
DIST count 12 width 0.3
0.3 0.00013462 2.14064e-05 8.31416e-05
0.6 7.43981e-05 2.33433e-05 8.31416e-05
0.75 6.10273e-05 2.51114e-05 8.31416e-05
0.9 5.26997e-05 2.56884e-05 8.31416e-05
1.05 4.78672e-05 2.43037e-05 8.31416e-05
1.2 4.15226e-05 2.59732e-05 8.31416e-05
1.35 3.73322e-05 2.70386e-05 8.31416e-05
1.5 3.34225e-05 2.85921e-05 8.31416e-05
1.8 2.82828e-05 3.04697e-05 8.31416e-05
2.4 2.12836e-05 3.36535e-05 8.31416e-05
3 1.5975e-05 3.66736e-05 8.31416e-05
3.3 0 4.88122e-05 8.31416e-05
END DIST

Metal 4 OVER 3
DIST count 12 width 0.3
0.3 0.000129348 2.85367e-05 8.31416e-05
0.6 6.43106e-05 3.91544e-05 8.31416e-05
0.75 5.20739e-05 4.24798e-05 8.31416e-05
0.9 4.34892e-05 4.55077e-05 8.31416e-05
1.05 3.82493e-05 4.63264e-05 8.31416e-05
1.2 3.19592e-05 4.91635e-05 8.31416e-05
1.35 2.78804e-05 5.0954e-05 8.31416e-05
1.5 2.43195e-05 5.2746e-05 8.31416e-05
1.8 2.00515e-05 5.4452e-05 8.31416e-05
2.4 7.39505e-06 6.38769e-05 8.31416e-05
3 0 6.97572e-05 8.31416e-05
3.3 0 6.52272e-05 8.31416e-05
END DIST

Metal 4 UNDER
WIDTH Table 1 entries:  0.3

Metal 4 UNDER 5
DIST count 12 width 0.3
0.3 0.000129674 2.95387e-05 8.31416e-05
0.6 6.24673e-05 4.34269e-05 8.31416e-05
0.75 4.86449e-05 4.74167e-05 8.31416e-05
0.9 3.99348e-05 4.9862e-05 8.31416e-05
1.05 3.44185e-05 5.03522e-05 8.31416e-05
1.2 2.80899e-05 5.31593e-05 8.31416e-05
1.35 2.38327e-05 5.5051e-05 8.31416e-05
1.5 2.00706e-05 5.7102e-05 8.31416e-05
1.8 1.54448e-05 5.95609e-05 8.31416e-05
2.4 0 7.31907e-05 8.31416e-05
3 0 7.29772e-05 8.31416e-05
3.3 0 7.17829e-05 8.31416e-05
END DIST

Metal 4 UNDER 6
DIST count 12 width 0.3
0.3 0.00013478 2.0134e-05 8.31416e-05
0.6 7.47396e-05 2.13365e-05 8.31416e-05
0.75 6.18365e-05 2.25749e-05 8.31416e-05
0.9 5.38091e-05 2.30012e-05 8.31416e-05
1.05 4.90172e-05 2.16488e-05 8.31416e-05
1.2 4.24008e-05 2.35253e-05 8.31416e-05
1.35 3.78599e-05 2.47892e-05 8.31416e-05
1.5 3.35762e-05 2.65101e-05 8.31416e-05
1.8 2.78068e-05 2.85796e-05 8.31416e-05
2.4 2.03511e-05 3.16547e-05 8.31416e-05
3 1.52777e-05 3.42825e-05 8.31416e-05
3.3 0 4.63387e-05 8.31416e-05
END DIST

Metal 4 DIAGUNDER
WIDTH Table 1 entries:  0.3

Metal 4 DIAGUNDER 5
DIST count 12 width 0.3
0 0 2.8468e-05 8.31416e-05
0.3 0 2.24759e-05 8.31416e-05
0.6 0 1.87444e-05 8.31416e-05
0.75 0 1.717e-05 8.31416e-05
0.9 0 1.58409e-05 8.31416e-05
1.05 0 1.47449e-05 8.31416e-05
1.2 0 0 8.31416e-05
1.35 0 1.2964e-05 8.31416e-05
1.5 0 1.23886e-05 8.31416e-05
1.8 0 1.15127e-05 8.31416e-05
2.4 0 1.02615e-05 8.31416e-05
3 0 9.15854e-06 8.31416e-05
END DIST

Metal 4 DIAGUNDER 6
DIST count 12 width 0.3
0 0 1.6435e-05 8.31416e-05
0.3 0 1.49117e-05 8.31416e-05
0.6 0 1.42584e-05 8.31416e-05
0.75 0 1.39137e-05 8.31416e-05
0.9 0 1.35575e-05 8.31416e-05
1.05 0 1.31927e-05 8.31416e-05
1.2 0 1.26674e-05 8.31416e-05
1.35 0 1.23051e-05 8.31416e-05
1.5 0 1.19499e-05 8.31416e-05
1.8 0 1.12788e-05 8.31416e-05
2.4 0 1.01561e-05 8.31416e-05
3 0 9.3296e-06 8.31416e-05
END DIST

Metal 4 OVERUNDER
WIDTH Table 1 entries:  0.3

Metal 4 OVER 1 UNDER 5
DIST count 12 width 0.3
0.3 0.000128376 3.1067e-05 8.31416e-05
0.6 6.13606e-05 4.48707e-05 8.31416e-05
0.75 4.74672e-05 4.90766e-05 8.31416e-05
0.9 3.89002e-05 5.13717e-05 8.31416e-05
1.05 3.31296e-05 5.24702e-05 8.31416e-05
1.2 2.67965e-05 5.54178e-05 8.31416e-05
1.35 2.2522e-05 5.74215e-05 8.31416e-05
1.5 1.87957e-05 5.9513e-05 8.31416e-05
1.8 1.42687e-05 6.19916e-05 8.31416e-05
2.4 0 7.46582e-05 8.31416e-05
3 0 7.46682e-05 8.31416e-05
3.3 0 7.42825e-05 8.31416e-05
END DIST

Metal 4 OVER 1 UNDER 6
DIST count 12 width 0.3
0.3 0.000133601 2.17778e-05 8.31416e-05
0.6 7.39221e-05 2.2518e-05 8.31416e-05
0.75 6.09569e-05 2.39483e-05 8.31416e-05
0.9 5.30266e-05 2.42e-05 8.31416e-05
1.05 4.7947e-05 2.34032e-05 8.31416e-05
1.2 4.12978e-05 2.54439e-05 8.31416e-05
1.35 3.67409e-05 2.68343e-05 8.31416e-05
1.5 3.2494e-05 2.86503e-05 8.31416e-05
1.8 2.6756e-05 3.09993e-05 8.31416e-05
2.4 1.92485e-05 3.47891e-05 8.31416e-05
3 1.40868e-05 3.79948e-05 8.31416e-05
3.3 0 4.91629e-05 8.31416e-05
END DIST

Metal 4 OVER 2 UNDER 5
DIST count 12 width 0.3
0.3 0.000127821 3.75588e-05 8.31416e-05
0.6 5.90859e-05 5.39502e-05 8.31416e-05
0.75 4.53591e-05 5.82426e-05 8.31416e-05
0.9 3.67944e-05 6.08801e-05 8.31416e-05
1.05 3.09894e-05 6.23195e-05 8.31416e-05
1.2 2.47212e-05 6.5501e-05 8.31416e-05
1.35 2.03661e-05 6.77849e-05 8.31416e-05
1.5 1.65503e-05 7.01253e-05 8.31416e-05
1.8 0 8.48739e-05 8.31416e-05
2.4 0 8.36479e-05 8.31416e-05
3 0 8.40355e-05 8.31416e-05
3.3 0 8.33309e-05 8.31416e-05
END DIST

Metal 4 OVER 2 UNDER 6
DIST count 12 width 0.3
0.3 0.000132847 2.3951e-05 8.31416e-05
0.6 7.17818e-05 2.6697e-05 8.31416e-05
0.75 5.86187e-05 2.86355e-05 8.31416e-05
0.9 5.05051e-05 2.93081e-05 8.31416e-05
1.05 4.53345e-05 2.87923e-05 8.31416e-05
1.2 3.88135e-05 3.09109e-05 8.31416e-05
1.35 3.43375e-05 3.23889e-05 8.31416e-05
1.5 3.01918e-05 3.42682e-05 8.31416e-05
1.8 2.45637e-05 3.6802e-05 8.31416e-05
2.4 1.71185e-05 4.0936e-05 8.31416e-05
3 0 5.63569e-05 8.31416e-05
3.3 0 5.40423e-05 8.31416e-05
END DIST

Metal 4 OVER 3 UNDER 5
DIST count 12 width 0.3
0.3 0.000121088 5.09774e-05 8.31416e-05
0.6 5.33022e-05 7.02808e-05 8.31416e-05
0.75 3.99645e-05 7.7017e-05 8.31416e-05
0.9 3.16083e-05 8.17643e-05 8.31416e-05
1.05 2.61709e-05 8.73438e-05 8.31416e-05
1.2 2.06714e-05 9.09281e-05 8.31416e-05
1.35 1.70692e-05 9.33104e-05 8.31416e-05
1.5 1.4253e-05 9.52268e-05 8.31416e-05
1.8 0 0.000108218 8.31416e-05
2.4 0 0.000106785 8.31416e-05
3 0 0.000107255 8.31416e-05
3.3 0 9.57325e-05 8.31416e-05
END DIST

Metal 4 OVER 3 UNDER 6
DIST count 12 width 0.3
0.3 0.000128196 3.09562e-05 8.31416e-05
0.6 6.20155e-05 4.29221e-05 8.31416e-05
0.75 4.97451e-05 4.65891e-05 8.31416e-05
0.9 4.11965e-05 4.97744e-05 8.31416e-05
1.05 3.55082e-05 5.15054e-05 8.31416e-05
1.2 2.89964e-05 5.48253e-05 8.31416e-05
1.35 2.46216e-05 5.70779e-05 8.31416e-05
1.5 2.08339e-05 5.92434e-05 8.31416e-05
1.8 1.61215e-05 6.16625e-05 8.31416e-05
2.4 0 7.50558e-05 8.31416e-05
3 0 7.39769e-05 8.31416e-05
3.3 0 7.04592e-05 8.31416e-05
END DIST

Metal 5 OVER
WIDTH Table 1 entries:  0.3

Metal 5 OVER 0
DIST count 12 width 0.3
0.3 0.00013498 1.66127e-05 8.4047e-05
0.6 7.55027e-05 1.8735e-05 8.4047e-05
0.75 6.35606e-05 1.89918e-05 8.4047e-05
0.9 5.83146e-05 1.78061e-05 8.4047e-05
1.05 5.51613e-05 1.35278e-05 8.4047e-05
1.2 4.90897e-05 1.52999e-05 8.4047e-05
1.35 4.47327e-05 1.6183e-05 8.4047e-05
1.5 4.10384e-05 1.70125e-05 8.4047e-05
1.8 3.51453e-05 1.84732e-05 8.4047e-05
2.4 2.72683e-05 2.05896e-05 8.4047e-05
3 2.27245e-05 2.16227e-05 8.4047e-05
3.3 0 3.61296e-05 8.4047e-05
END DIST

Metal 5 OVER 1
DIST count 12 width 0.3
0.3 0.000132532 1.9212e-05 8.4047e-05
0.6 7.52466e-05 1.86864e-05 8.4047e-05
0.75 6.3514e-05 1.88008e-05 8.4047e-05
0.9 5.78423e-05 1.7764e-05 8.4047e-05
1.05 5.44184e-05 1.50214e-05 8.4047e-05
1.2 4.84808e-05 1.68544e-05 8.4047e-05
1.35 4.41608e-05 1.77626e-05 8.4047e-05
1.5 4.04433e-05 1.857e-05 8.4047e-05
1.8 3.44374e-05 1.98869e-05 8.4047e-05
2.4 2.65215e-05 2.16322e-05 8.4047e-05
3 2.22962e-05 2.2468e-05 8.4047e-05
3.3 0 3.8146e-05 8.4047e-05
END DIST

Metal 5 OVER 2
DIST count 12 width 0.3
0.3 0.000132294 2.01266e-05 8.4047e-05
0.6 7.50338e-05 1.97465e-05 8.4047e-05
0.75 6.32199e-05 2.02392e-05 8.4047e-05
0.9 5.71906e-05 1.92995e-05 8.4047e-05
1.05 5.33924e-05 1.65396e-05 8.4047e-05
1.2 4.73049e-05 1.82402e-05 8.4047e-05
1.35 4.29818e-05 1.90621e-05 8.4047e-05
1.5 3.93781e-05 1.98386e-05 8.4047e-05
1.8 3.37277e-05 2.12673e-05 8.4047e-05
2.4 2.61743e-05 2.36264e-05 8.4047e-05
3 2.15616e-05 2.51268e-05 8.4047e-05
3.3 0 4.00653e-05 8.4047e-05
END DIST

Metal 5 OVER 3
DIST count 12 width 0.3
0.3 0.000134953 1.82933e-05 8.4047e-05
0.6 7.49247e-05 2.05088e-05 8.4047e-05
0.75 6.31347e-05 2.09918e-05 8.4047e-05
0.9 5.71099e-05 2.01121e-05 8.4047e-05
1.05 5.32502e-05 1.74854e-05 8.4047e-05
1.2 4.70446e-05 1.93638e-05 8.4047e-05
1.35 4.25769e-05 2.03776e-05 8.4047e-05
1.5 3.88205e-05 2.13497e-05 8.4047e-05
1.8 3.28816e-05 2.31685e-05 8.4047e-05
2.4 2.49231e-05 2.62616e-05 8.4047e-05
3 2.01313e-05 2.83618e-05 8.4047e-05
3.3 0 4.2536e-05 8.4047e-05
END DIST

Metal 5 OVER 4
DIST count 12 width 0.3
0.3 0.000124467 3.32051e-05 8.4047e-05
0.6 6.49111e-05 3.79266e-05 8.4047e-05
0.75 4.94709e-05 4.44985e-05 8.4047e-05
0.9 4.27544e-05 4.62717e-05 8.4047e-05
1.05 3.81419e-05 4.59791e-05 8.4047e-05
1.2 3.2001e-05 4.91035e-05 8.4047e-05
1.35 2.76438e-05 5.11059e-05 8.4047e-05
1.5 2.23935e-05 5.45118e-05 8.4047e-05
1.8 1.73826e-05 5.69391e-05 8.4047e-05
2.4 0 7.16714e-05 8.4047e-05
3 0 7.0651e-05 8.4047e-05
3.3 0 6.84734e-05 8.4047e-05
END DIST

Metal 5 UNDER
WIDTH Table 1 entries:  0.3

Metal 5 UNDER 6
DIST count 12 width 0.3
0.3 0.000129561 2.57192e-05 8.4047e-05
0.6 6.82724e-05 3.2066e-05 8.4047e-05
0.75 5.56305e-05 3.44478e-05 8.4047e-05
0.9 4.87786e-05 3.53348e-05 8.4047e-05
1.05 4.4183e-05 3.43902e-05 8.4047e-05
1.2 3.4479e-05 4.07522e-05 8.4047e-05
1.35 2.98494e-05 4.28988e-05 8.4047e-05
1.5 2.60499e-05 4.48322e-05 8.4047e-05
1.8 1.87661e-05 4.95981e-05 8.4047e-05
2.4 0 6.57769e-05 8.4047e-05
3 0 6.45244e-05 8.4047e-05
3.3 0 6.44354e-05 8.4047e-05
END DIST

Metal 5 DIAGUNDER
WIDTH Table 1 entries:  0.3

Metal 5 DIAGUNDER 6
DIST count 12 width 0.3
0 0 4.72749e-05 8.4047e-05
0.3 0 3.51949e-05 8.4047e-05
0.6 0 3.04805e-05 8.4047e-05
0.75 0 2.825e-05 8.4047e-05
0.9 0 2.61827e-05 8.4047e-05
1.05 0 2.43165e-05 8.4047e-05
1.2 0 2.26714e-05 8.4047e-05
1.35 0 2.12505e-05 8.4047e-05
1.5 0 2.00436e-05 8.4047e-05
1.8 0 1.81939e-05 8.4047e-05
2.4 0 1.60884e-05 8.4047e-05
3 0 1.50833e-05 8.4047e-05
END DIST

Metal 5 OVERUNDER
WIDTH Table 1 entries:  0.3

Metal 5 OVER 1 UNDER 6
DIST count 12 width 0.3
0.3 0.000127039 2.8329e-05 8.4047e-05
0.6 6.73604e-05 3.29318e-05 8.4047e-05
0.75 5.48579e-05 3.52375e-05 8.4047e-05
0.9 4.78545e-05 3.6196e-05 8.4047e-05
1.05 4.3217e-05 3.60091e-05 8.4047e-05
1.2 3.32572e-05 4.27549e-05 8.4047e-05
1.35 2.87809e-05 4.47874e-05 8.4047e-05
1.5 2.50944e-05 4.65823e-05 8.4047e-05
1.8 1.82523e-05 5.07751e-05 8.4047e-05
2.4 0 6.62976e-05 8.4047e-05
3 0 6.52153e-05 8.4047e-05
3.3 0 6.59205e-05 8.4047e-05
END DIST

Metal 5 OVER 2 UNDER 6
DIST count 12 width 0.3
0.3 0.000127313 2.8287e-05 8.4047e-05
0.6 6.64916e-05 3.41066e-05 8.4047e-05
0.75 5.42948e-05 3.63315e-05 8.4047e-05
0.9 4.73843e-05 3.71305e-05 8.4047e-05
1.05 4.26918e-05 3.68391e-05 8.4047e-05
1.2 3.26327e-05 4.35535e-05 8.4047e-05
1.35 2.8051e-05 4.56481e-05 8.4047e-05
1.5 2.42886e-05 4.75616e-05 8.4047e-05
1.8 1.73864e-05 5.20549e-05 8.4047e-05
2.4 0 6.72002e-05 8.4047e-05
3 0 6.62274e-05 8.4047e-05
3.3 0 6.70374e-05 8.4047e-05
END DIST

Metal 5 OVER 3 UNDER 6
DIST count 12 width 0.3
0.3 0.000128259 2.76449e-05 8.4047e-05
0.6 6.66318e-05 3.43327e-05 8.4047e-05
0.75 5.41091e-05 3.6866e-05 8.4047e-05
0.9 4.69268e-05 3.79301e-05 8.4047e-05
1.05 4.20616e-05 3.7854e-05 8.4047e-05
1.2 3.19879e-05 4.46633e-05 8.4047e-05
1.35 2.7443e-05 4.68165e-05 8.4047e-05
1.5 2.37351e-05 4.87712e-05 8.4047e-05
1.8 1.69058e-05 5.33675e-05 8.4047e-05
2.4 0 6.83387e-05 8.4047e-05
3 0 6.76355e-05 8.4047e-05
3.3 0 6.86077e-05 8.4047e-05
END DIST

Metal 5 OVER 4 UNDER 6
DIST count 12 width 0.3
0.3 0.000118947 4.2632e-05 8.4047e-05
0.6 5.59364e-05 5.42854e-05 8.4047e-05
0.75 4.16513e-05 6.09369e-05 8.4047e-05
0.9 3.41948e-05 6.42384e-05 8.4047e-05
1.05 2.89683e-05 6.77522e-05 8.4047e-05
1.2 2.31929e-05 7.14027e-05 8.4047e-05
1.35 1.91679e-05 7.38763e-05 8.4047e-05
1.5 1.51982e-05 7.67205e-05 8.4047e-05
1.8 0 9.05266e-05 8.4047e-05
2.4 0 8.94761e-05 8.4047e-05
3 0 8.93451e-05 8.4047e-05
3.3 0 8.66917e-05 8.4047e-05
END DIST

Metal 6 OVER
WIDTH Table 1 entries:  1.6

Metal 6 OVER 0
DIST count 12 width 1.6
1.6 7.70729e-05 1.28045e-05 9.17809e-06
3.2 4.16244e-05 1.88284e-05 9.17809e-06
4 3.48301e-05 2.00604e-05 9.17809e-06
4.8 2.6323e-05 2.44741e-05 9.17809e-06
5.6 2.11475e-05 2.79931e-05 9.17809e-06
6.4 1.8024e-05 2.94431e-05 9.17809e-06
7.2 1.52961e-05 3.08489e-05 9.17809e-06
8 1.2645e-05 3.24527e-05 9.17809e-06
9.6 0 4.238e-05 9.17809e-06
12.8 0 4.238e-05 9.17809e-06
16 0 4.238e-05 9.17809e-06
17.6 0 4.238e-05 9.17809e-06
END DIST

Metal 6 OVER 1
DIST count 12 width 1.6
1.6 7.19486e-05 1.8829e-05 9.17809e-06
3.2 3.52496e-05 2.65377e-05 9.17809e-06
4 2.90202e-05 2.76408e-05 9.17809e-06
4.8 2.27583e-05 3.01556e-05 9.17809e-06
5.6 2.01529e-05 3.07735e-05 9.17809e-06
6.4 1.72664e-05 3.19809e-05 9.17809e-06
7.2 1.49349e-05 3.30767e-05 9.17809e-06
8 1.31706e-05 3.38606e-05 9.17809e-06
9.6 0 4.50357e-05 9.17809e-06
12.8 0 4.50357e-05 9.17809e-06
16 0 4.50357e-05 9.17809e-06
17.6 0 4.50357e-05 9.17809e-06
END DIST

Metal 6 OVER 2
DIST count 12 width 1.6
1.6 7.10745e-05 2.03342e-05 9.17809e-06
3.2 3.46109e-05 2.80483e-05 9.17809e-06
4 2.86897e-05 2.90316e-05 9.17809e-06
4.8 2.2429e-05 3.16663e-05 9.17809e-06
5.6 1.95747e-05 3.26047e-05 9.17809e-06
6.4 1.63627e-05 3.42501e-05 9.17809e-06
7.2 1.3644e-05 3.59528e-05 9.17809e-06
8 1.15423e-05 3.73185e-05 9.17809e-06
9.6 0 4.694e-05 9.17809e-06
12.8 0 4.694e-05 9.17809e-06
16 0 4.69399e-05 9.17809e-06
17.6 0 4.694e-05 9.17809e-06
END DIST

Metal 6 OVER 3
DIST count 12 width 1.6
1.6 7.02601e-05 2.23789e-05 9.17809e-06
3.2 3.39067e-05 3.03091e-05 9.17809e-06
4 2.80698e-05 3.13882e-05 9.17809e-06
4.8 2.18995e-05 3.4238e-05 9.17809e-06
5.6 1.89842e-05 3.54822e-05 9.17809e-06
6.4 1.56361e-05 3.7427e-05 9.17809e-06
7.2 1.27255e-05 3.93898e-05 9.17809e-06
8 1.04513e-05 4.10674e-05 9.17809e-06
9.6 0 4.94384e-05 9.17809e-06
12.8 0 4.94384e-05 9.17809e-06
16 0 4.94384e-05 9.17809e-06
17.6 0 4.94384e-05 9.17809e-06
END DIST

Metal 6 OVER 4
DIST count 12 width 1.6
1.6 6.80065e-05 3.08092e-05 9.17809e-06
3.2 3.11529e-05 4.09903e-05 9.17809e-06
4 2.52695e-05 4.26191e-05 9.17809e-06
4.8 1.95731e-05 4.5394e-05 9.17809e-06
5.6 1.71543e-05 4.65081e-05 9.17809e-06
6.4 1.43636e-05 4.82015e-05 9.17809e-06
7.2 1.19349e-05 4.98456e-05 9.17809e-06
8 9.71357e-06 5.13053e-05 9.17809e-06
9.6 0 5.93438e-05 9.17809e-06
12.8 0 5.93438e-05 9.17809e-06
16 0 5.93438e-05 9.17809e-06
17.6 0 5.93438e-05 9.17809e-06
END DIST

Metal 6 OVER 5
DIST count 12 width 1.6
1.6 4.58753e-05 8.66149e-05 9.17809e-06
3.2 1.69415e-05 9.51655e-05 9.17809e-06
4 1.46117e-05 9.29103e-05 9.17809e-06
4.8 1.11675e-05 9.4683e-05 9.17809e-06
5.6 1.03559e-05 9.50345e-05 9.17809e-06
6.4 8.96503e-06 9.59997e-05 9.17809e-06
7.2 7.95878e-06 9.68055e-05 9.17809e-06
8 8.77124e-06 9.4236e-05 9.17809e-06
9.6 0 0.00010429 9.17809e-06
12.8 0 0.00010429 9.17809e-06
16 0 0.00010429 9.17809e-06
17.6 0 0.000103758 9.17809e-06
END DIST

Metal 6 UNDER
WIDTH Table 0 entries: 

Metal 6 DIAGUNDER
WIDTH Table 0 entries: 
END DensityModel 0